Silicon-based Proton Exchange Membrane for Micro Direct Methanol Fuel Cells
نویسندگان
چکیده
This paper presents our research on silicon-based proton exchange membranes for siliconbased micro fuel cell applications. The porous silicon membranes with a thickness of 20-40 m were fabricated. And the porous silicon-based proton exchange membranes were formed by using the combination of the porous silicon membranes and Nafion solution. The proton conductivities of the porous silicon-based PEMs are 0.01~0.07s/cm comparable to Nafion (0.05~0.08s/cm). It makes possible to realize a kind of simple structure, silicon-based micro fuel cell, which can be integrated with other MEMS devices.
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